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FIB/SEM Double Beam / Triple BeamÀåÄ¡
XVision 300 DB/H
XVision 300 DB/F
XVision 300 TB/H
XVision 300 TB/F
SMI 3000 series¸¦ ±âº»À¸·ÎÇÑ °í¼º´É ÀÚµ¿È­ platform¿¡ SIINTÁ¦ ½ÅÇü Ion Column°ú ¼¼°èÃÖ°í ¼öÁØÀÇ SEMºÐÇØ´ÉÀ» ¹ßÈÖÇÏ´Â Carl Zeiss»çÁ¦ GeminiÀüÀÚ Çö¹Ì°æÀ» žÀçÇÏ¿© Á¾·¡ÀÇ Á¦Ç°°ú ºñ±³ÇÏ¿© Àú Damage °íÁ¤µµÀÇ °¡°ø°ú 3nmÀÇ °íºÐÇØ´É¿¡ ÀÇÇÑ SEM°üÂûÀ» ½ÇÇöÇÏ¿´½À´Ï´Ù.
¨ç Àú°¡¼Ó Ion Beam ¹× Ar Ion Beam¿¡ ÀÇÇÑ °íÇ°ÁúÀÇ TEM½Ã·á Á¦ÀÛ.
¨è TEM½Ã·á Á¦ÀÛÁß¿¡ °íºÐÇØ´É SEM¿¡ ÀÇÇÑ ¸®¾óŸÀÓ ¸ð´ÏÅ͸µ ±â´É.
¨é ´ëÀü·ù Ion Beam¿¡ ÀÇÇÑ High Throughput´Ü¸é°¡°ø, TEM½Ã·á Á¦ÀÛ.
¨ê °í¼º´É ¿¬¼Ó A-TEM±â´É.
¨ë DB,TB ¶Ç´Â ½Ã·áÃë±Þȯ°æ(¹Ý¼Û°è)¿¡ ´ëÀÀÇÑ 4±âÁ¾ Line up.
XVision300series XVision300 DB/H XVision300 DB/F XVision300TB/H XVision300TB/F
½Ã·á Size ÃÖ´ë 300mm JEIDA±Ô°Ý Wafer
½Ã·á Stage 5-Axis Motor Eucentric Tilt Stage
°¡¼ÓÀü¾Ð 1~30KV
2Â÷ÀüÀÚ Image ºÐÇØ´É 4nm
ÃÖ´ë Àü·ù¹Ðµµ 45nA
°¡¼ÓÀü¾Ð 1~30KV
2Â÷ÀüÀÚ Image ºÐÇØ´É 3nm
°¡¼ÓÀü¾Ð - - 0.5~1KV 0.5~1KV
ÃÖ´ë ºöÀü·ù - - 10nA(@1kV) 10nA(@1kV)
Holder¹Ý¼Û°è ÀÚµ¿¹Ý¼Û(FOUP)Çü Holder¹Ý¼Û°è ÀÚµ¿¹Ý¼Û(FOUP)Çü
1. Micro Probing System
2. ÀÚµ¿Cut&See±â´É
3. 4ch Multiple Gas System(MGS)
4. ¿¬¼ÓÀÚµ¿°¡°ø ´Ü¸éÃøÁ¤ Software
5. TEM Sample ¿¬¼ÓÀÚµ¿ °¡°ø Soft Ware
6. Defect °Ë»çÀåºñLinkage, CAD Navigation Linkage Soft
* ±âŸ SMI-3000series¿¡´Â ´Ù¾çÇÑ ¼±Åûç¾çÀ» ÁغñÇÏ°íÀÖ½À´Ï´Ù.