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ÃÖ´ëÅ©±â 1400¡¿1600 mm , ÃÖ¼ÒÅ©±â 6 Inch
ÃÖ´ëµÎ²² 15mm , Ãּҵβ² 5mm
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Ga Liquid Metal ion Source |
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ÃÖ´ë°¡¼Ó Àü¾Ð 30kV |
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D.Lock : 50nm(3¥ò ,10um FOV)
Á¶°Ç : Ç¥ÁØ Mask.
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2Â÷ ÀüÀÚ Image ¹× 2Â÷ Ion Image |
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ÃÖ¼Ò ¼öÁ¤°¡´É ¼±Æø 0.3um (10um FOV »ç¿ë)
¼±Æø 0.36um À̻󿡼 1Point Drift º¸Á¤ °¡´É.
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12.5nm (10um FOV »ç¿ë)
25.0nm (20um FOV »ç¿ë)
50.0nm (40um FOV »ç¿ë)
100nm (80um FOV »ç¿ë)
150nm (120um FOV »ç¿ë)
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