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DC Magnetron/ ÆòÇà ÆòÆÇÆò |
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49mm dia/ Au£ø1 |
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1.2kV |
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90(dia)£ø 90(death) mm (SUS Á¦) |
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50mm dia (T-S°£ Á¶Àý¹üÀ§ 20~35mm) |
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Á÷°áÇü Rotary Pump
20L/min (ÀÚµ¿ Leaking system) |
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´Ü»ó AC 100V¡¾10% 50/60Hz 7A |
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º»Ã¼ : 160(W) x 255(D) x 286(H) mm, 10 kg
RP : 295.5(W) x 156(D) x 199.5(H) mm, 9 kg |
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