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Á÷·ù Magnetron ¹æÀüÇü Ion Gun |
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Àΰ¡Àü¾Ð
Á¶»çÀü·ù
Beam Á÷°æ
Á¶»ç¹üÀ§ |
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1 ¢¦ 8keV Max. 400¥ìA Max. ¥õ4mm ¥õ8mm (ȸÀü½Ã) |
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ÃÖ´ë
20nm/min (Si ±âÆÇ/8keV ½Ã) |
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Ar Gas »ç¿ë
(¼øµµ B ÀÌ»ó/0.15MPa) |
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³»°æ ¥õ160mm×H140mm (SUS Á¦) |
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TÃࣺ¡¡£90°¢¦
£«90°
RÃࣺ¡¡360°(Max. 15RPM) |
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¥õ50mm×H23.5mm (´Ü, ¥õ100mm ÀåÂø °¡´É) |
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TMP£º
50l/sec¡¡¡¡RP£º 20l/min |
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10-4Pa ´ë |
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520/310/280mm (´Ü, TMP ºÎ¸¦ Æ÷ÇÔÇÒ °æ¿ì D£º470mm) |
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¾à 25kg
(RP Á¦¿Ü) |
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´Ü»ó 100V 15A
50/60Hz 3P Äܼ¾Æ® |
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