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Analysis System

SEMICAPS 5000

Analysis System
개요
A state-of-the-art wafer analysis system that integrates Laser Timing Probe (LTP), Scanning Optical Microscope (SOM), Photon Emission Microscope (PEM), and Thermal Microscopy (THM) technologies for comprehensive and precise wafer analysis..

특징

Features & Capabilities

•  Elminate the need for sorting, dicing and repackaging of the wafer
•  Able to analyze at full tester speeds of up to 8 GHz
•  Land more than 10000 pins using a standard production probe card
•  High resolution motorized XYZ wafer stage with 0.1µm accuracy
•  Able to handle 200mm and 300mm wafers
•  ARSIL option: compatible with full thickness, unthinned wafer