CONTACT
Coater
특징
1. Ideal for polishing sample surfaces that cannot be effectively treated by electrolytic or chemical polishing.
2. Also suitable as a finishing process after electrolytic or chemical polishing.
3. No special sample preparation is required for ion milling.
4. Provides high-precision processing with excellent cost performance compared to FIB systems.
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SPEC |
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Ion Gun Type |
DC Magnetron discharge type |
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Voltage & Current |
1~8keV / Max. 400㎂ |
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Beam diameter & Range |
Max. Φ4mm / Φ8mm(in case of Rotation) |
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Ultimate Pressure & Etching Speed |
10^-4Pa / Max. 20nm/min(Si board/8keV) |
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Chamber & Gas |
Inner diameter Φ160mm * H140MM(SUS)/ Ar Gas(Purity more than B/0.15MPa) |
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Stage |
T axis : -90˚ ~ +90˚ R axis : 360˚(Max.15RPM) |
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Dimensions & Weight |
520(W) X 310(D) X 280(H)mm, 25kg |
Utility Requirement | Single phase 100V 15A 50/60Hz 3P outlet |