CONTACT
Coater
특징
1. Magnetron cathode minimizes sample damage.
2. 0–3 kV variable voltage enables deposition and thickness control of high-melting-point metal films.
3. Ideal for SEM sample preparation.
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SPEC |
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Standard Target |
50mm dia./AuX1(for coating) |
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Sample Base |
70min dia(Height adjustment range - 15, 20, 60 mm) |
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Sputtering System | DC Magnetron Sputtering/Parallel-plate type |
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Evacuation operation & Vacuum of Degree |
Manual / 10Pa |
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High Voltage Power Supply |
0~3kV/0~20mA |
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Chamber Size |
120(dia.) x 120(depth)mm (Made of stainless steel) |
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Dimensions and Weight |
Main unit : 225(W) X 420(D) X 320(H)mm, 15kg RP : 350(W) X 160(D) X 200(H)mm, 11kg |
| Power Supply | Single Phase AC 100V 50/60Hz 10A |