CONTACT
Analysis System
특징
Features & Capabilities
• Ultra-stable
system compatible for probing FIB pads
• Compatible
with third-party probe stations, probe cards and manipulators
• High
resolution stage with 0.5 μm repeatability
• Option
to use with Aplanatic Refractive Solid Immersion Lens (ARSIL)
• CAD
interface option
• Compatible
with thermal management solutions
• Microscope
Techniques includes a combination of:
• Laser Timing Probe (LTP)
• Scanning Optical Microscopy (SOM)
with best sensitivity
• static: TIVA, OBIRCH
• dynamic: LADA, SDL
• Photon
Emission Microscopy (PEM) with various options for
• InGaAs or Si-CCD camera
• Thermal Microscopy (THM) with InSb camera
• Dual
Column: NIR/Thermal