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Analysis System

SEMICAPS 3000

Analysis System
개요
A versatile analysis system optimized for frontside and backside wafer analysis, wafer-level parts, and packaged devices.
(Compatible with docking to all ATE platforms)

특징

Features & Capabilities

•  Easily moved from Tester to Tester
•  Custom docking for all ATE platforms
•  High resolution stage with 0.5 μm repeatability
•  Option to use with an Aplanatic Refractive Solid Immersion Lens (ARSIL)
•  CAD Interface option
•  Compatible with Thermal Management Solutions
•  Microscope Techniques include a combination of:
•  Laser Timing Probe (LTP)
•  Scanning Optical Microscopy (SOM) with best sensitivity
•  static: TIVA, OBIRCH
•  dynamic: LADA, SDL
•  Photon Emission Microscopy (PEM) with various option for
•  InGaAs or Si-CCD Camera

•  Thermal Microscopy (THM) with InSb camera