CONTACT
Analysis System
특징
Features & Capabilities
• 300
mm wafer stage including auto-lock
• Compatible
with third-party probe stations, probe cards and manipulators
• Docks
easily to Tester or Probe Station
• High
resolution stage with 0.5 um repeatability
• Option
to use with an Aplanatic Refractive Solid Immersion Lens (ARSIL)
• CAD
interface option
• Compatible
with Thermal Management Solutions
• Microscope
Techniques include a combination of:
• Laser
Timing Probe (LTP)
• Scanning
Optical Microscopy (SOM) with best sensitivity
• static: TIVA, OBIRCH
• dynamic: LADA, SDL
• Photon
Emission Microscopy (PEM) with various options for
• InGaAs or Si-CCD camera
• Thermal Microscopy (THM) with InSb camera